Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shankar Swaminathan0
Mandyam Sriram0
Pramod Subramonium0
Vishwanathan Rangarajan0
Andrew J. McKerrow0
Bart van Schravendijk0
Dennis Hausmann0
Jon Henri0
...
Date of Patent
August 7, 2018
0Patent Application Number
154268890
Date Filed
February 7, 2017
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by intermittent delivery of dopant species to the film between the cycles of adsorption and reaction.
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