Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mark D. Jaffe0
Jeffrey P. Gambino0
John J. Ellis-Monaghan0
Kirk D. Peterson0
Date of Patent
August 14, 2018
0Patent Application Number
154080120
Date Filed
January 17, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Photodiode structures and methods of manufacture are disclosed. The method includes forming a waveguide structure in a dielectric layer. The method further includes forming a Ge material in proximity to the waveguide structure in a back end of the line (BEOL) metal layer. The method further includes crystallizing the Ge material into a crystalline Ge structure by a low temperature annealing process with a metal layer in contact with the Ge material.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.