Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 22, 2019
Patent Application Number
15807054
Date Filed
November 8, 2017
Patent Citations
Patent Primary Examiner
Patent abstract
Photodiode structures and methods of manufacture are disclosed. The method includes forming a waveguide structure in a dielectric layer. The method further includes forming a Ge material in proximity to the waveguide structure in a back end of the line (BEOL) metal layer. The method further includes crystallizing the Ge material into a crystalline Ge structure by a low temperature annealing process with a metal layer in contact with the Ge material.
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