Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Teruhiko Kodama0
Akihiro Kubo0
Date of Patent
September 11, 2018
Patent Application Number
15267183
Date Filed
September 16, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
There is provided a substrate processing method which includes polishing a rear surface of a substrate before a pattern exposure such that the rear surface is subjected to a roughening treatment; and bypassing a roughness alleviating treatment with respect to the polished rear surface of the substrate.
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