Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nyi O. Myo0
Blake Koelmel0
Date of Patent
September 11, 2018
0Patent Application Number
137861890
Date Filed
March 5, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Embodiments of the present invention provide apparatus and methods for supporting, positioning or rotating a semiconductor substrate during processing. One embodiment of the present invention provides a method for processing a substrate comprising positioning the substrate on a substrate receiving surface of a susceptor, and rotating the susceptor and the substrate by delivering flow of fluid from one or more rotating ports.
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