US Patent 10074555 Non-contact substrate processing
Patent 10074555 was granted and assigned to Applied Materials on September, 2018 by the United States Patent and Trademark Office.
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Patent abstract
Embodiments of the present invention provide apparatus and methods for supporting, positioning or rotating a semiconductor substrate during processing. One embodiment of the present invention provides a method for processing a substrate comprising positioning the substrate on a substrate receiving surface of a susceptor, and rotating the susceptor and the substrate by delivering flow of fluid from one or more rotating ports.
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Patent Inventor Names
Blake Koelmel0
Nyi O. Myo0
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
100745550
Date of Patent
September 11, 2018
0Patent Application Number
137861890
Date Filed
March 5, 2013
0Patent Citations Received
Patent Primary Examiner
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US Patent 10074555 Non-contact substrate processing
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10074555
Date of patent
September 11, 2018
Patent application number
13786189
Date Filed
March 5, 2013
Patent primary examiner
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