Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David Thompson0
Ziqing Duan0
Abhijit Basu Mallick0
Benjamin Schmiege0
Jeffrey W. Anthis0
Susmit Singha Roy0
Date of Patent
September 25, 2018
0Patent Application Number
157181480
Date Filed
September 28, 2017
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Processing methods comprising selectively orthogonally growing a first material through a mask to provide an expanded first material are described. The mask can be removed leaving the expanded first material extending orthogonally from the surface of the first material. Further processing can create a self-aligned via.
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