Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Junichi Koezuka0
Daisuke Kurosaki0
Kenichi Okazaki0
Masami Jintyou0
Shunpei Yamazaki0
Takashi Hamochi0
Toshimitsu Obonai0
Yasuharu Hosaka0
...
Date of Patent
October 9, 2018
Patent Application Number
15391186
Date Filed
December 27, 2016
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A metal oxide film includes indium, M, (M is Al, Ga, Y, or Sn), and zinc and includes a region where a peak having a diffraction intensity derived from a crystal structure is observed by X-ray diffraction in the direction perpendicular to the film surface. Moreover, a plurality of crystal parts is observed in a transmission electron microscope image in the direction perpendicular to the film surface. The proportion of a region other than the crystal parts is higher than or equal to 20% and lower than or equal to 60%.
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