Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshimitsu Obonai0
Yukinori Shima0
Daisuke Kurosaki0
Junichi Koezuka0
Kenichi Okazaki0
Masami Jintyou0
Shunpei Yamazaki0
Takashi Hamochi0
...
Date of Patent
July 13, 2021
0Patent Application Number
167396470
Date Filed
January 10, 2020
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A metal oxide film includes indium, M, (M is Al, Ga, Y, or Sn), and zinc and includes a region where a peak having a diffraction intensity derived from a crystal structure is observed by X-ray diffraction in the direction perpendicular to the film surface. Moreover, a plurality of crystal parts is observed in a transmission electron microscope image in the direction perpendicular to the film surface. The proportion of a region other than the crystal parts is higher than or equal to 20% and lower than or equal to 60%.
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