US Patent 10100858 Wafer-to-wafer alignment method
Patent 10100858 was granted and assigned to California Institute of Technology on October, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 28, 2016
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Date of Patent
October 16, 2018
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Patent Applicant
Patent Application Number
15337745
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Patent Inventor Names
Theodore Reck
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Ken B. Cooper
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Risaku Toda
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Robert H. Lin
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Alejandro Peralta
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Bertrand Thomas
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Cecile Jung-Kubiak
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Choonsup Lee
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Goutam Chattopadhyay
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Imran Mehdi
0
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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