Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Christoph Husemann0
Jan Hendrik Peters0
Dirk Seidel0
Jörg Frederik Blumrich0
Date of Patent
October 23, 2018
0Patent Application Number
154002210
Date Filed
January 6, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In a method for localizing defects on a substrate for EUV masks, a phase contrast optical unit having a phase mask is used for examining the substrate.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
