US Patent 10108085 Method for localizing defects on substrates
All edits
Edits on 22 May, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 8 May, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 14 Mar, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 22 Feb, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Edits on 8 Dec, 2023
Golden AI
Edits made to:
Article (+166 characters)
Article
Patent abstract
In a method for localizing defects on a substrate for EUV masks, a phase contrast optical unit having a phase mask is used for examining the substrate.
Edits on 1 Oct, 2023
Golden AI
Edits made to:
Infobox (+4 properties)
Infobox
Patent Inventor Names
Christoph Husemann0
Dirk Seidel0
Jan Hendrik Peters0
Jörg Frederik Blumrich0
Edits on 24 Apr, 2023
Golden AI
Infobox
Patent Citations Received
Edits on 25 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
101080850
Date of Patent
October 23, 2018
0Patent Application Number
154002210
Date Filed
January 6, 2017
0Patent Citations Received
Patent Primary Examiner
Edits on 15 Feb, 2023
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 7 Feb, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
Edits on 22 Jan, 2022
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 10108085 Method for localizing defects on substrates
Infobox
Is a
Patent jurisdiction
Patent number
10108085
Date of patent
October 23, 2018
Patent application number
15400221
Date Filed
January 6, 2017
Patent primary examiner
Find more entities like US Patent 10108085 Method for localizing defects on substrates
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
