Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 10109517 Rotational indexer with additional rotational axes

Patent 10109517 was granted and assigned to Lam Research on October, 2018 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Current Assignee
Lam Research
Lam Research
Date Filed
January 10, 2018
Date of Patent
October 23, 2018
Patent Applicant
Lam Research
Lam Research
Patent Application Number
15867599
Patent Citations Received
‌
US Patent 12077861 Dithering or dynamic offsets for improved uniformity
0
‌
US Patent 11482436 Rotational indexer with additional rotational axes
‌
US Patent 11851760 PECVD deposition system for deposition on selective side of the substrate
0
‌
US Patent 11948817 Robot for simultaneous substrate transfer
0
‌
US Patent 11946142 Spatially tunable deposition to compensate within wafer differential bow
0
‌
US Patent 12074042 High-density substrate processing systems and methods
0
‌
US Patent 11476135 Robot for simultaneous substrate transfer
‌
US Patent 10796940 Enhanced automatic wafer centering system and techniques for same
‌
US Patent 11574826 High-density substrate processing systems and methods
0
‌
US Patent 11581214 Enhanced automatic wafer centering system and techniques for same
•••
Patent Inventor Names
Karl F. Leeser
0
Richard M. Blank
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10109517
Patent Primary Examiner
‌
Gerald McClain

Find more entities like US Patent 10109517 Rotational indexer with additional rotational axes

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo