Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wen-Chih Chiou0
Hsiang-Yi Wang0
Li-Hsien Huang0
Tsang-Jiuh Wu0
Chen-Hua Yu0
Cheng-Hung Chang0
Chia-Lin Yu0
Chun Hua Chang0
...
Date of Patent
October 30, 2018
0Patent Application Number
152147760
Date Filed
July 20, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor component includes a semiconductor substrate having an opening A first dielectric liner having a first compressive stress is disposed in the opening. A second dielectric liner having a tensile stress is disposed on the first dielectric liner. A third dielectric liner having a second compressive stress disposed on the second dielectric liner.
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