Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Abedel Halim Zahr0
Romain Stefanini0
Pierre Blondy0
Ling Yan Zhang0
Date of Patent
November 6, 2018
Patent Application Number
15520667
Date Filed
October 19, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
A microelectromechanical system switch includes a signal input line, a signal output line, a deformable conducting membrane electrically connected to the signal output line and including a contact dimple facing the signal input line, and an actuation electrode. The membrane has a planar round shape, with a radial opening in the direction of the signal input line, narrowing from the periphery towards the center of the membrane, the contact dimple being formed in the central region of the membrane, the actuation electrode has the same shape as the membrane, and the gap between the membrane, facing the actuation electrode, and the actuation electrode is an airgap only.
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