Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 18, 2021
Patent Application Number
16215925
Date Filed
December 11, 2018
Patent Citations
Patent Primary Examiner
Patent abstract
A microelectromechanical and/or nanoelectromechanical device having a fixed part, at least one suspended part configured to be moveable in the plane of the device with respect to the fixed part along at least one first direction and a first suspension means for suspending the suspended part. The first suspension means includes two suspension elements each having a first end fixed directly to the suspended part and a second end connected to the fixed part, each suspension element having a half-ellipse shape in the plane and extending between the first end and the second end, and the two suspension elements being arranged with respect to each other so as to form an ellipse.
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