US Patent 10134619 Connecting mechanism and connecting method of substrate container
Patent 10134619 was granted and assigned to Tokyo Electron on November, 2018 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 2, 2017
0
Date of Patent
November 20, 2018
0
Patent Applicant
Patent Application Number
15423483
0
Patent Citations Received
•••
Patent Inventor Names
Norihiko Tsuji
0
Keisuke Kondoh
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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