Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Matt Eichenfield0
Brian D. Homeijer0
Date of Patent
November 27, 2018
Patent Application Number
15009153
Date Filed
January 28, 2016
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
The present application relates to vertically integrated assemblies including a MEMS-based optomechanical architecture. In some embodiments, the assembly includes a MEMS/optoelectronic module, an emitter module, and a detector module, where these modules are vertically integrated. Methods of fabricating such assemblies are also described herein.
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