Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Seung Bae Oh0
Masahiko Uchiyama0
Tae Young Eom0
Date of Patent
November 27, 2018
0Patent Application Number
151214810
Date Filed
August 24, 2015
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A purge module which can provide a conventional load port without a gas purging function with the gas purging function, and a load port having the purge module are disclosed. The purge module comprises a jig, a gas control box and pipes. The jig is detachably attached to an upper side of a stage of a load port. The jig comprises a gas inlet for providing a wafer carrier with gas and a gas outlet for receiving gas from the wafer carrier. The gas control box is detachably attached to the load port to control gas flow. The pipes connect the jig and the gas control box.
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