Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 27, 2019
Patent Application Number
15628820
Date Filed
June 21, 2017
Patent Citations
Patent Primary Examiner
Patent abstract
A purge module jig and a purge module including the purge module jig are provided. The purge module jig and the purge module include a plate having a recessed groove and an opening formed therein, a gas transfer pipe having an elliptical cross section, and a fixing part fixing the plate and the gas transfer pipe with each other, so that leakage of cleaning gas is prevented, thickness thereof is reduced, the interference between the jig and a wafer cassette is reduced, the purge module jig and the purge module can be applied to various load ports of various manufactures, and performance thereof can be improved.
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