Is a
Patent attributes
Patent Applicant
Patent Jurisdiction
Patent Number
Date of Patent
December 11, 2018
Patent Application Number
15602722
Date Filed
May 23, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
Disclosed is a substrate treating apparatus including the following units: a supplying unit which supplies a process liquid including a sublimable substance in a melt state on a pattern-formed surface of a substrate W; a solidifying unit which solidifies the process liquid on the pattern-formed surface to produce a solidified body; and a sublimating unit which sublimates the solidified body to remove the solidified body from the pattern-formed surface. In this apparatus, the sublimable substance includes a fluorinated carbon compound.
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