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US Patent 10153181 Substrate treating apparatus and substrate treating method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
May 23, 2017
Date of Patent
December 11, 2018
Patent Applicant
Screen Holdings
Screen Holdings
Patent Application Number
15602722
Patent Citations Received
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US Patent 12064930 Ultraviolet curing apparatus
0
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US Patent 10964525 Removing a sacrificial material via sublimation in forming a semiconductor
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US Patent 11328925 Substrate drying method and substrate processing apparatus
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US Patent 11508569 Surface treatment compositions and methods
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US Patent 10497559 Method for dehydrating semiconductor structure and dehydrating method of the same
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10153181
Patent Primary Examiner
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Stephen M Gravini

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