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US Patent 10162265 Pattern treatment methods
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Patent
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Date Filed
October 18, 2016
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Date of Patent
December 25, 2018
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Patent Application Number
15296592
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Patent Citations Received
US Patent 11348800 Ultra narrow trench patterning with dry plasma etching
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US Patent 11894237 Ultra narrow trench patterning with dry plasma etching
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Patent Inventor Names
Jong Keun Park
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Phillip D. Hustad
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Amy M. Kwok
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Mingqi Li
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10162265
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Patent Primary Examiner
Kathleen Duda
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