Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yutaka Fujino0
Date of Patent
January 1, 2019
Patent Application Number
15128804
Date Filed
February 27, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate processing system for performing a process with respect to a plurality of substrates includes an annular process chamber configured to accommodate the plurality of substrates and to perform a predetermined process on the plurality of substrates, a cassette mounting part configured to mount a cassette which accommodates the plurality of substrates, and a substrate transfer mechanism configured to transfer the plurality of substrates between the annular process chamber and the cassette mounting part. The plurality of substrates is concentrically disposed within the annular process chamber in a plane view.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
