Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
January 1, 2019
Patent Application Number
15449946
Date Filed
March 4, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.
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