US Patent 10170701 Controlled deposition of materials using a differential pressure regime
Patent 10170701 was granted and assigned to Universal Display Corporation on January, 2019 by the United States Patent and Trademark Office.
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Patent abstract
Methods and devices for controlling pressures in microenvironments between a deposition apparatus and a substrate are provided. Each microenvironment is associated with an aperture of the deposition apparatus which can allow for control of the microenvironment.
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
101707010
Date of Patent
January 1, 2019
0Patent Application Number
154499460
Date Filed
March 4, 2017
0Patent Primary Examiner
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
101707010
Date of Patent
January 1, 2019
0Patent Application Number
154499460
Date Filed
March 4, 2017
0Patent Primary Examiner
Edits on 24 Jan, 2022
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US Patent 10170701 Controlled deposition of materials using a differential pressure regime
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10170701
Date of patent
January 1, 2019
Patent application number
15449946
Date Filed
March 4, 2017
Patent primary examiner
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