Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marcel Koenraad Marie Baggen0
Jan Steven Christiaan Westerlaken0
Jeroen Arnoldus Leonardus Johannes Raaymakers0
Marc Wilhelmus Maria Van Der Wijst0
Frank Pieter Albert Van Den Berkmortel0
Fransiscus Mathijs Jacobs0
Date of Patent
January 29, 2019
Patent Application Number
15558552
Date Filed
February 22, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
A measurement system for a lithographic apparatus includes a sub-frame compliantly mounted on a reference frame. A measurement device, e.g. an alignment sensor, is mounted on the sub-frame. Soft mounting of the sub-frame isolates the alignment sensor from high-frequency disturbances, e.g. acoustic noise, by acting as a low-pass filter with a cut-off frequency, e.g. in the range of from 100 to 200 Hz.
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