Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nadir Dagli0
Date of Patent
February 5, 2019
Patent Application Number
15649455
Date Filed
July 13, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer containing an intrinsic silicon layer semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers.
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