US Patent 10197884 Sub-volt drive 100 GHz bandwidth electro-optic modulator
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Patent abstract
Electro-optical modulators and methods of fabrication are disclosed. An electro-optical modulator includes a Mach-Zehnder interferometer containing an intrinsic silicon layer semiconductor layer and a coplanar waveguide. Signals from the coplanar waveguide are capacitively coupled to the Mach-Zehnder interferometer through first and second dielectric layers.
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Patent Inventor Names
Nadir Dagli0
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Patent Citations Received
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US Patent 10197884 Sub-volt drive 100 GHz bandwidth electro-optic modulator
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Is a
Patent jurisdiction
Patent number
10197884
Date of patent
February 5, 2019
Patent application number
15649455
Date Filed
July 13, 2017
Patent primary examiner
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