Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chun-Hsiang Fan0
Tung Ying Lee0
Yu-Lien Huang0
Date of Patent
February 5, 2019
0Patent Application Number
144604380
Date Filed
August 15, 2014
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A semiconductor device includes a fin feature in a substrate, a stack of semiconductor layers over the fin feature. Each of the semiconductor layers does not contact each other. The device also includes a semiconductor oxide layer interposed between the fin feature and the stack of the semiconductor layers. A surface of the semiconductor oxide layer contacts the fin feature and an opposite surface of the semiconductor oxide layer contacts a bottom layer of the stack of semiconductor layers. The device also includes a conductive material layer encircling each of the semiconductor layers and filling in spaces between each of two semiconductor layers.
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