US Patent 10209411 Multilayer mirror
Patent 10209411 was granted and assigned to Carl Zeiss SMT on February, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 23, 2016
Date of Patent
February 19, 2019
Patent Applicant
Patent Application Number
15078105
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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