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US Patent 10215317 Additively manufactured gas distribution manifold

Patent 10215317 was granted and assigned to Lam Research on February, 2019 by the United States Patent and Trademark Office.

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Patent attributes

Patent Applicant

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Current Assignee

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Christopher William Burkhart0

Andrew C. Lee0

David J. Hemker0

Date of Patent

February 26, 2019

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Patent Application Number

150878890

Date Filed

March 31, 2016

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Patent Citations

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US Patent 10128087 Configuration independent gas delivery system

Patent Citations Received

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US Patent 10794519 Additively manufactured gas distribution manifold

US Patent 10914003 Monolithic gas distribution manifold and various construction techniques and use cases therefor

US Patent 11293308 Turbomachine lubrication unit and method of manufacture

Patent Primary Examiner

0

Patent abstract

Methods and apparatuses for additively manufactured tubular passages, additively manufactured manifolds, and additively manufactured heaters are provided.

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