US Patent 10215317 Additively manufactured gas distribution manifold
Patent 10215317 was granted and assigned to Lam Research on February, 2019 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 31, 2016
0
Date of Patent
February 26, 2019
0
Patent Applicant
Patent Application Number
15087889
0
Patent Citations Received
Patent Inventor Names
Christopher William Burkhart
0
Andrew C. Lee
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David J. Hemker
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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