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US Patent 10234425 Thin film bulk acoustic resonator with signal enhancement

Patent 10234425 was granted and assigned to Qorvo on March, 2019 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

Qorvo

Current Assignee

Qorvo

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

102344250

Patent Inventor Names

Michael Salvati0

Ian Robert Harmon0

Date of Patent

March 19, 2019

Patent Application Number

148503530

Date Filed

September 10, 2015

Patent Citations Received

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US Patent 11408855 Bulk acoustic wave resonator with increased dynamic range

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US Patent 11940414 Crowded sensor

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US Patent 11933793 Two part assembly

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US Patent 10539537 Thin film bulk acoustic resonator with signal enhancement

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US Patent 11325121 Analyte depletion for sensor equilibration

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US Patent 11860129 Bulk acoustic wave resonator with increased dynamic range

Patent Primary Examiner

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Robert T. Crow

Patent abstract

Sensitivity of thin film bulk acoustic resonance (TFBAR) sensors is enhanced by mass amplification and operating a high frequency.

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