Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael Salvati0
Ian Robert Harmon0
Date of Patent
January 21, 2020
0Patent Application Number
162853040
Date Filed
February 26, 2019
0Patent Primary Examiner
Patent abstract
Sensitivity of thin film bulk acoustic resonance (TFBAR) sensors is enhanced by mass amplification and operating a high frequency.
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