Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kirill Urievich Sobolev0
Date of Patent
April 2, 2019
0Patent Application Number
157779080
Date Filed
November 21, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An alignment system uses a self-referencing interferometer that incorporates an objective lens system having a plurality of lens element groups. In an embodiment, the objective is configured and arranged to provide a large numerical aperture, long working distance, and low wavefront error.
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