Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Henricus Petrus Maria Pellemans0
Simon Reinald Huisman0
Sebastianus Adrianus Goorden0
Filippo Alpeggiani0
Date of Patent
July 2, 2024
0Patent Application Number
177733840
Date Filed
October 19, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
Disclosed is a method of metrology such as alignment metrology. The method comprises obtaining pupil plane measurement dataset at a pupil plane relating to scattered radiation resultant from a measurement of a structure. The method comprises determining a measurement value or correction therefor using the pupil plane measurement dataset and a sensor term relating to sensor optics used to perform said measurement.
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