US Patent 10262936 Semiconductor device and manufacturing method thereof

A semiconductor device according to the present embodiment includes a stacked body having an end which is step-shaped and a contact in each of the steps of the end. Each of the steps includes alternating a plurality of conductive layers and a plurality of insulating layers. The contact includes a plurality of conductive films contacting each of the conductive layers, and a plurality of insulating films contacting each of the insulating layers, the insulating films being provided between the conductive films.