Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kangguo Cheng0
Juntao Li0
Zhenxing Bi0
Peng Xu0
Date of Patent
April 16, 2019
0Patent Application Number
158057000
Date Filed
November 7, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods of forming integrated chips include forming a respective stack of sheets in two regions, each stack having first layers and second layers. The second layers are etched away in the first region. The second region is annealed to change the composition of the first layers in the second region by interaction with the second layers in the second region. A gate stack is formed in the first and second region.
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