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US Patent 11527535 Variable sheet forkFET device

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Date of Patent

December 13, 2022

Patent Application Number

17248342

Date Filed

January 21, 2021

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Patent Primary Examiner

CPC Code

H01L 2029/42388

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An embodiment of the invention may include a forkFET semiconductor structure, and the method of forming said structure. The structure may include a first FET device and a second FET device separated by a vertical dielectric pillar. The first FET device may include a first plurality of horizontal sheet channels. The second FET device may include a second plurality of horizontal sheet channels. The first plurality of horizontal sheet channels contains more horizontal sheets than the second plurality of horizontal sheet channels. This may enable adjustment of W

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