Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kurt Kern0
Eric Madsen0
Date of Patent
April 23, 2019
0Patent Application Number
152446350
Date Filed
August 23, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed. A showerhead assembly includes a stem, face plate and back plate wherein the stem is rotary friction welded to the back plate. A substrate pedestal assembly is configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.
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