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US Patent 10266947 Rotary friction welded blank for PECVD heated showerhead

Patent 10266947 was granted and assigned to Lam Research on April, 2019 by the United States Patent and Trademark Office.

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Patent abstract

A deposition apparatus for processing substrates includes a vacuum chamber including a processing zone in which a substrate may be processed. A showerhead assembly includes a stem, face plate and back plate wherein the stem is rotary friction welded to the back plate. A substrate pedestal assembly is configured to support a substrate on an upper surface thereof when a substrate is processed in the deposition apparatus.

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Patent Inventor Names
Eric Madsen0
Kurt Kern0
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=102669470
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Lam Research
Lam Research
0
Current Assignee
Lam Research
Lam Research
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
102669470
Date of Patent
April 23, 2019
0
Patent Application Number
152446350
Date Filed
August 23, 2016
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=102669470
Patent Citations Received
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US Patent 10741365 Low volume showerhead with porous baffle
0
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US Patent 10941489 Rotary friction welded blank for PECVD heated showerhead
0
Patent Primary Examiner
‌
Kiley S Stoner
0
Edits on 18 Jun, 2022
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edited on 18 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10266947
Edits on 10 Feb, 2022
"update inverses"
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edited on 10 Feb, 2022
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Patent citations received
‌
US Patent 10941489 Rotary friction welded blank for PECVD heated showerhead
Edits on 6 Feb, 2022
"update inverses"
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Golden AI
edited on 6 Feb, 2022
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Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 10741365 Low volume showerhead with porous baffle
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 US Patent 10266947 Rotary friction welded blank for PECVD heated showerhead

Infobox
Is a
Patent
Patent
Patent applicant
Lam Research
Lam Research
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10266947
Date of patent
April 23, 2019
Patent application number
15244635
Date Filed
August 23, 2016
Patent primary examiner
‌
Kiley S Stoner

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