US Patent 10269613 Substrate conveying robot and method of operating the same

A substrate conveying robot has left and right arms having a common pivot axis line, an arm drive unit for driving the left and right arms, and a control unit for controlling the arm drive unit. A pulley ratio between a turning pulley, a first pulley, a second pulley, and a third pulley is set so that a moving locus of the substrate holding members when the first link member is rotated about the pivot axis line by the first drive portion so as to extend and contract the arm in a state that the turning pulley is fixed is substantially linear. Thereby, the moving locus of the substrate holding member when extending and contracting the arm can be substantially linear.