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US Patent 10872798 Substrate transfer mechanism, substrate processing apparatus, and substrate transfer method

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Is a

Patent

Patent attributes

Patent Applicant

Tokyo Electron

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

10872798

Date of Patent

December 22, 2020

Patent Application Number

16548652

Date Filed

August 22, 2019

Patent Citations

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US Patent 10615068 Substrate handling system for aligning and orienting substrates during a transfer operation

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US Patent 10029363 Dual arm robot

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US Patent 10269613 Substrate conveying robot and method of operating the same

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US Patent 10427303 Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing

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US Patent 10504763 Substrate transport vacuum platform

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US Patent 10679879 Substrate processing apparatus

Patent Primary Examiner

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Kaitlin S Joerger

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