Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Martin Hosek0
Christopher Hofmeister0
Date of Patent
December 10, 2019
0Patent Application Number
158419860
Date Filed
December 14, 2017
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to, form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.
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