Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 11, 2019
Patent Application Number
15805764
Date Filed
November 7, 2017
Patent Citations
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Processing methods comprising depositing a film on a substrate surface and in a surface feature with chemical planarization to remove the film from the substrate surface, leaving the film in the feature. A pillar is grown from the film so that the pillar grows orthogonally to the substrate surface.
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