US Patent 10319627 Air-gap spacers for field-effect transistors
Is a
Date Filed
December 13, 2016
0
Date of Patent
June 11, 2019
0
Patent Application Number
15376831
0
Patent Inventor Names
Hoon Kim
0
Ruilong Xie
0
Chanro Park
0
Min Gyu Sung
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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