Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ziqing Duan0
Abhijit Basu Mallick0
Atashi Basu0
Srinivas Gandikota0
Date of Patent
June 11, 2019
0Patent Application Number
158019490
Date Filed
November 2, 2017
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
Methods comprising depositing a film material to form an initial film in a trench in a substrate surface are described. The film is treated to expand the film to grow beyond the substrate surface.
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