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US Patent 10319636 Deposition and treatment of films for patterning

Patent 10319636 was granted and assigned to Applied Materials on June, 2019 by the United States Patent and Trademark Office.

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edited on 9 Dec, 2023

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Patent abstract

Methods comprising depositing a film material to form an initial film in a trench in a substrate surface are described. The film is treated to expand the film to grow beyond the substrate surface.

Edits on 2 Oct, 2023

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edited on 2 Oct, 2023

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Patent Inventor Names

Abhijit Basu Mallick0

Atashi Basu0

Srinivas Gandikota0

Ziqing Duan0

Edits on 19 Jul, 2023

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edited on 19 Jul, 2023

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Patent Citations Received

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US Patent 11705366 Methods for controllable metal and barrier-liner recess

Edits on 24 May, 2023

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edited on 24 May, 2023

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=103196360

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Patent Citations Received

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US Patent 10790191 Selective removal process to create high aspect ratio fully self-aligned via

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US Patent 10593594 Selectively etched self-aligned via processes

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US Patent 10699952 Deposition and treatment of films for patterning

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US Patent 10600688 Methods of producing self-aligned vias

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US Patent 10840186 Methods of forming self-aligned vias and air gaps

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edited on 3 Apr, 2023

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US Patent 10636659 Selective deposition for simplified process flow of pillar formation

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US Patent 11315943 Bottom-up approach to high aspect ratio hole formation in 3D memory structures

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US Patent 10892183 Methods for removing metal oxides

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US Patent 10573555 Methods of producing self-aligned grown via

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edited on 28 Mar, 2023

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US Patent 10741435 Oxidative volumetric expansion of metals and metal containing compounds

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edited on 27 Mar, 2023

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US Patent 11037825 Selective removal process to create high aspect ratio fully self-aligned via

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Golden AI

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US Patent 10930503 Geometric control of bottom-up pillars for patterning applications

Edits on 27 Sep, 2022

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Golden AI

edited on 27 Sep, 2022

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Patent Citations Received

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US Patent 10930503 Geometric control of bottom-up pillars for patterning applications

"update citations for inverse infoboxes"

Golden AI

edited on 27 Sep, 2022

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Patent Citations Received

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US Patent 10699953 Method for creating a fully self-aligned via

"update citations for inverse infoboxes"

Golden AI

edited on 26 Sep, 2022

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Patent Citations Received

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US Patent 11062942 Methods for controllable metal and barrier-liner recess

"update citations for inverse infoboxes"

Golden AI

edited on 26 Sep, 2022

Infobox

Patent Citations Received

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US Patent 10840186 Methods of forming self-aligned vias and air gaps

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