Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kangguo Cheng0
James J. Demarest0
Juntao Li0
Date of Patent
June 11, 2019
0Patent Application Number
159930420
Date Filed
May 30, 2018
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A vertical fuse element, including, a conductive silicide base on a surface of a substrate, and a conductive silicide pillar extending in a direction perpendicular to the surface of the substrate, where the conductive silicide pillar is on the conductive silicide base, and wherein the conductive silicide pillar includes an upper portion having a width, W5, a base having a width, W6, and a neck region having a width, W7, where W7<W5, and W7≤W6.
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